Table 1 from Quantifying plasma immersion ion implantation of insulating surfaces in a dielectric barrier discharge: how to control the dose

The voltages V1 and V4 measured on the wire probe during phases 1 and 4 respectively, as a function of the voltage applied to the hollow cathode electrode, the pressure and the on-time of the pulses. Phase 2 and Phase 4 implanted charge are calculated from equations (3.14) and (4.15) as discussed in the text.